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Proceedings Paper

Angle-Scanning Laser Interferometer For Film Thickness Measurement
Author(s): Piotr W. Kiedron
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Paper Abstract

A laser interferometer where intensity is measured as function of incidence angle is described. Number of fringes and/or their location in interferogram defines plastic film thickness. With simplest method of signal processing, thickness accuracy is within 2% for films over 50 micrometers. The fringe interval method improves accuracy to within 0.1% for films over 10 micrometers. Special least-square methods may improve accuracy further or even allow a simultaneous index of refraction and thickness measurement. The method is intended for industrial on-line monitoring of plastic film thickness.

Paper Details

Date Published: 5 August 1986
PDF: 13 pages
Proc. SPIE 0621, Manufacturing Applications of Lasers, (5 August 1986); doi: 10.1117/12.961153
Show Author Affiliations
Piotr W. Kiedron, NDC Systems (United States)

Published in SPIE Proceedings Vol. 0621:
Manufacturing Applications of Lasers
Peter K. Cheo, Editor(s)

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