Share Email Print

Proceedings Paper

Laser Processing Research For IC Manufacture
Author(s): William C. Holton
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Recent advances in the use of lasers for integrated circuit processing have developed effective techniques for cleaning, deposition, and etching of materials for both steered and large area projection to the degree that lasers are serious contenders to play an important role for in situ integrated circuit manufacturing.

Paper Details

Date Published: 5 August 1986
PDF: 6 pages
Proc. SPIE 0621, Manufacturing Applications of Lasers, (5 August 1986); doi: 10.1117/12.961146
Show Author Affiliations
William C. Holton, Semiconductor Research Corporation (United States)

Published in SPIE Proceedings Vol. 0621:
Manufacturing Applications of Lasers
Peter K. Cheo, Editor(s)

© SPIE. Terms of Use
Back to Top