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Proceedings Paper

Amorphous Silicon Image Pickup Tubes
Author(s): S. Ishioka; C. Kusano; Y. Takasaki; Y, Shimomoto; T. Hirai
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Paper Abstract

Reactively sputtered a-Si:H is used in a photoconductive target of an image pickup tube. When a-Si:H is used for a color imager, high resistivity and wide optical band gap are required. A blocking type target structure is effective in reducing dark current and producing rapid photo response. Low doping of boron into a-Si:H serves to increase both hole and electron mobilities. The imaging tube using this a-Si:H has high photosensitivity, high resolution, and no sticking or burning. By using high velocity electron beam for scanning, lag property is drastically improved.

Paper Details

Date Published: 12 March 1986
PDF: 5 pages
Proc. SPIE 0617, Amorphous Semiconductors for Microelectronics, (12 March 1986); doi: 10.1117/12.961080
Show Author Affiliations
S. Ishioka, Hitachi Ltd. (Japan)
C. Kusano, Hitachi Ltd. (Japan)
Y. Takasaki, Hitachi Ltd. (Japan)
Y, Shimomoto, Hitachi Ltd. (Japan)
T. Hirai, Hitachi Ltd. (Japan)

Published in SPIE Proceedings Vol. 0617:
Amorphous Semiconductors for Microelectronics
David Adler, Editor(s)

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