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Proceedings Paper

Large Scale Fabrication Of Lightweight Si/SiC LIDAR Mirrors
Author(s): Jitendra Singh Goela; Raymond L. Taylor
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Paper Abstract

Small models (7.5-cm dia.) of lightweight Si/SiC mirrors have been fabricated via a scalable chemical vapor deposition process. These mirrors consist of a low f-number (f/1.6), concave faceplate of SiC coated with CVD Si, and a lightweight back-up structure made of SiC. The lightweight structure consists of an outer hexagonal cell with six triangular inner cells. The complete lightweight mirror substrate was fabricated directly in a CVD chamber, and no bonding agent was used to attach the SiC back-up structure to the faceplate. The Si/SiC mirrors were polished to a figure of 1/5th of a wave and a surface finish of 10 Å RMS. The CVD mirror fabrication process was scaled from a small horizontal research furnace to a vertical pilot-plant size CVD reactor. Silicon carbide depositions were successfully performed to fabricate 40-cm-diameter f/1.6 concave mirror faceplates. Currently, experiments are under way to fabricate a SiC lightweight structure on the backside of the SiC faceplate. Experimental results and important issues concerning the large scale fabrication of mirrors via CVD are discussed.

Paper Details

Date Published: 26 October 1989
PDF: 11 pages
Proc. SPIE 1118, Space Optical Materials and Space Qualification of Optics, (26 October 1989); doi: 10.1117/12.960943
Show Author Affiliations
Jitendra Singh Goela, Morton Thiokol, Inc./CVD Inc. (United States)
Raymond L. Taylor, Morton Thiokol, Inc./CVD Inc. (United States)

Published in SPIE Proceedings Vol. 1118:
Space Optical Materials and Space Qualification of Optics
Robert R. Hale, Editor(s)

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