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Proceedings Paper

Thin Film Technologies In Active Matrix Addressing System Of LCDs
Author(s): Yue Kuo
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Paper Abstract

The success of Liquid Crystal Display (LCD) is recently one of the most important achievements in the flat panel display area. In addition to liquid crystal material improvements, the active matrix (AM) addressing system, prepared by the thin film technology, contributes a great deal to the success of LCDs. This paper identifies three major areas that are critical to the AM system: structure, which includes conventional and novel multilayer devices; material, which covers semiconductors, dielectrics, metals, and organic polymers; and process, which contains unit processes such as deposition, etching, lithography, contact, planarization, self-alignment, and redundant structures. Each of these areas will be critically reviewed and discussed, with emphasis on recent thin film transistor developments.

Paper Details

Date Published: 21 March 1989
PDF: 9 pages
Proc. SPIE 1117, Display System Optics II, (21 March 1989); doi: 10.1117/12.960928
Show Author Affiliations
Yue Kuo, T. J. Watson Research Center (United States)

Published in SPIE Proceedings Vol. 1117:
Display System Optics II
Harry M. Assenheim, Editor(s)

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