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Proceedings Paper

Infrared Properties (3-5 m) Of Ion Plated Thin Films
Author(s): K. H. Guenther; P. Sachdeva; Z. Taubenfeld
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Paper Abstract

Thin films deposited by standard electron beam evaporation have a columnar microstructure and consequential water adsorption which is not prevalent in fully dense ion plated optical coatings. In electron beam evaporated films the water becomes an intrinsic part of the film since the packing density is less than unity, and causes absorption at and around 3 μm. In contrast, the absence of water in ion plated films makes a number of oxide coatings suitable for use in the first atmospheric window (3-5 μm). In this study, the spectral transmission curves of single layer and broadband multilayer coatings in the 4000 - 2000 cm-1 range show clearly that ion plated coatings do not contain any water, while electron beam evaporated thin films have strong absorption around 3400 cm-1. The refractive indices of several oxide, silicon nitride, and pure silicon films are shown to be consistently higher for ion plating than for electron beam evaporation, also indicating a higher packing density.

Paper Details

Date Published: 11 September 1989
PDF: 7 pages
Proc. SPIE 1112, Window and Dome Technologies and Materials, (11 September 1989); doi: 10.1117/12.960801
Show Author Affiliations
K. H. Guenther, University of Central Florida (United States)
P. Sachdeva, University of Central Florida (United States)
Z. Taubenfeld, University of Central Florida (United States)

Published in SPIE Proceedings Vol. 1112:
Window and Dome Technologies and Materials
Paul Klocek, Editor(s)

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