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Proceedings Paper

Automated Visual Inspection Of Infrared Focal Plane Arrays
Author(s): R. E. Welt; P. R. Patterson; C. B. McNeill
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Paper Abstract

Since 1987, SBRC has been under contract to the US Air Force (Aeronautical Systems Division, Wright-Patterson Air Force Base) for the Photovoltaic Mercury Cadmium Telluride Infrared Focal Plane Array Manufacturing Technology program. One task in this program is the development of automated visual inspection of arrays to increase effective testing, improve throughput and reduce costs. Each array produced by this program, while only a quarter inch square, has 16,384 diodes. Thorough visual inspection, electrical and physical wafer screening, and final performance testing of arrays is both difficult and time consuming. Physical defects can range from excess debris between diodes to missing or smeared indium bumps. These conditions adversely effect electrical performance and must be identified. The automated visual inspection system will be used to screen out unacceptable arrays, and to reduce costly downstream steps of hybridization (i.e. mating of an array to a readout) and final testing. This will result in reduced labor and better early attrition which will significantly lower the overall product cost, as well as increase the throughput capacity. The automated inspection system, currently under development at SBRC, is built around an Applied Intelligent Systems AIS-5000TM parallel processor. Other modules of the system include a microscope with quadocular head (four viewing ports), computer controlled X-Y stage, and variable lighting schemes. This paper will report on system hardware and software development, algorithm development and verification, and the manner in which automated inspection complements current testing methods.

Paper Details

Date Published: 25 September 1989
PDF: 8 pages
Proc. SPIE 1108, Test and Evaluation of Infrared Detectors and Arrays, (25 September 1989); doi: 10.1117/12.960689
Show Author Affiliations
R. E. Welt, Santa Barbara Research Center (United States)
P. R. Patterson, Santa Barbara Research Center (United States)
C. B. McNeill, Santa Barbara Research Center (United States)

Published in SPIE Proceedings Vol. 1108:
Test and Evaluation of Infrared Detectors and Arrays
Forney M. Hoke, Editor(s)

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