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Proceedings Paper

Laser-Induced Forward Transfer Of Metal Oxides To Trim The Frequency Of Surface Acoustic Wave Resonator Devices
Author(s): James A. Greer; Thomas E. Parker
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Paper Abstract

The frequencies of surface acoustic wave resonators (SAWRs) sealed in novel all quartz packages have been accurately set using laser-induced forward transfer (LIFT) of aluminum-oxide thin films. This technique allows accurate frequency adjustment of SAWRs over -40 parts per million (PPM) with a resolution of better than ±1 PPM. This technique does not significantly degrade relevant electrical SAWR device characteristics and provides the user with substantial cost and time savings when setting a SAWR oscillator to frequency. However, some degradation in the long-term stability of oscillators driven by laser-trimmed SAWR devices has been measured. The quality of the LIFT-deposited oxide film plays an important role in both the frequency sensitivity and long-term stability of laser-trimmed SAWR devices.

Paper Details

Date Published: 16 December 1988
PDF: 13 pages
Proc. SPIE 0998, Excimer Beam Applications, (16 December 1988); doi: 10.1117/12.960218
Show Author Affiliations
James A. Greer, Raytheon Company (United States)
Thomas E. Parker, Raytheon Company (United States)


Published in SPIE Proceedings Vol. 0998:
Excimer Beam Applications
Anthony N. Pirri; Bernhard P. Piwczyk, Editor(s)

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