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Proceedings Paper

Advances In Excimer Laser Materials Processing
Author(s): G. Darcy Poulin; Peter A. Eisele
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Paper Abstract

Excimer lasers are finding increasing use in the area of laser materials processing. Of particular importance is the fact that excimers can remove material through ablation rather than by any purely thermal mechanism such as those associated with YAG or C02 processing. This paper reviews briefly the basic mechanisms associated with excimer laser ablation and presents several examples of practical applications of this new technique.

Paper Details

Date Published: 16 December 1988
PDF: 6 pages
Proc. SPIE 0998, Excimer Beam Applications, (16 December 1988); doi: 10.1117/12.960214
Show Author Affiliations
G. Darcy Poulin, Lumonics Inc (Canada)
Peter A. Eisele, Lumonics Inc (Canada)

Published in SPIE Proceedings Vol. 0998:
Excimer Beam Applications
Anthony N. Pirri; Bernhard P. Piwczyk, Editor(s)

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