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Proceedings Paper

XeCl Laser Ablation Of Organic Polymers: Characterization Of Debris And Its Effect On Surface Morphology
Author(s): Donald L. Singleton; George Paraskevopoulos; Robert S. Irwin; Roderick S. Taylor; Kurt E. Leopold
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Paper Abstract

Evidence is presented, that the formation of conical structures on the surface of polyi-mide etched at low laser fluences is caused by shielding of the underlying polymer by particulate debris. The results show that with increasing diameter of the etched zone, higher laser fluences are required to achieve a smooth surface. XeCl ablation of polyimide in an atmosphere of oxygen at 0.2 J/cm2 results in oxidation of nearly 90% of ablated carbon to CO2 and CO, but does not eliminate the deposition of debris on the perimeter of the etched zone.

Paper Details

Date Published: 16 December 1988
PDF: 4 pages
Proc. SPIE 0998, Excimer Beam Applications, (16 December 1988); doi: 10.1117/12.960210
Show Author Affiliations
Donald L. Singleton, National Research Council of Canada (Canada)
George Paraskevopoulos, National Research Council of Canada (Canada)
Robert S. Irwin, National Research Council of Canada (Canada)
Roderick S. Taylor, National Research Council of Canada (Canada)
Kurt E. Leopold, National Research Council of Canada (Canada)

Published in SPIE Proceedings Vol. 0998:
Excimer Beam Applications
Anthony N. Pirri; Bernhard P. Piwczyk, Editor(s)

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