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Proceedings Paper

Incorporating Beam Diagnostics Into UV Laser Delivery Systems
Author(s): W . B . Telfair; P. R. Yoder; C. A. Martin; R. L. Labinger; W. C. Fricke
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Paper Abstract

Optimum performance of a laser beam delivery system can generally be achieved only if key parameters are well known and controlled in real time or, at least, quasi-real time. Parameters of importance in typical applications of excimer lasers include energy delivered per pulse, size and shape of the beam, distribution of intensity over the beam's cross section, and the instantaneous and average location of the beam with respect to a target. The stability of each of these parameters over time is also of great importance. To maximize repeatability and uniformity of the laser system's performance, diagnostic measurement equipment should be integrated into the laser and beam delivery system itself. To maximize reliability of the measurement, it should be traceable to NBS standards. In this paper, selected techniques for accomplishing the desired diagnostic measurements are described briefly and hardware implications of incorporating diagnostic subsystems into typical beam delivery systems are discussed.

Paper Details

Date Published: 16 December 1988
PDF: 9 pages
Proc. SPIE 0998, Excimer Beam Applications, (16 December 1988); doi: 10.1117/12.960208
Show Author Affiliations
W . B . Telfair, Taunton Technologies, Inc. (United States)
P. R. Yoder, Taunton Technologies, Inc. (United States)
C. A. Martin, Taunton Technologies, Inc. (United States)
R. L. Labinger, Taunton Technologies, Inc. (United States)
W. C. Fricke, Taunton Technologies, Inc. (United States)


Published in SPIE Proceedings Vol. 0998:
Excimer Beam Applications
Anthony N. Pirri; Bernhard P. Piwczyk, Editor(s)

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