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Proceedings Paper

KrF Laser Induced Color Centers In Commercial Fused Silicas
Author(s): Gary C. Escher
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Paper Abstract

This paper provides an overview of color center generation mechanisms in fused silica. Recent results obtained at Bell Laboratories, and elsewhere, proving the existence of excimer laser induced color centers are summarized. The impact of color centers on emerging DUV technologies are discussed, with regard to possible system power restrictions for acceptable optical lifetimes.

Paper Details

Date Published: 16 December 1988
PDF: 8 pages
Proc. SPIE 0998, Excimer Beam Applications, (16 December 1988); doi: 10.1117/12.960206
Show Author Affiliations
Gary C. Escher, AT&T Bell Laboratories (United States)


Published in SPIE Proceedings Vol. 0998:
Excimer Beam Applications
Anthony N. Pirri; Bernhard P. Piwczyk, Editor(s)

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