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Proceedings Paper

A Versatile Excimer Laser Processing System
Author(s): G . Darcy Poulin; Peter A. Eisele
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Paper Abstract

Excimer lasers are proving to be a unique and versatile tool in any materials processing applications. This paper reviews briefly. some of the fundamental aspects of excimer laser processing, and describes a general purpose excimer laser workstation. Examples of several relevant application areas are also discussed.

Paper Details

Date Published: 16 December 1988
PDF: 7 pages
Proc. SPIE 0998, Excimer Beam Applications, (16 December 1988); doi: 10.1117/12.960204
Show Author Affiliations
G . Darcy Poulin, Lumonics Inc. (Canada)
Peter A. Eisele, Lumonics Inc. (Canada)

Published in SPIE Proceedings Vol. 0998:
Excimer Beam Applications
Anthony N. Pirri; Bernhard P. Piwczyk, Editor(s)

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