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Proceedings Paper

Improved Beam Uniformity In Excimer Lasers
Author(s): U. Sowada; J. Sercel; H. J. Kahlert; D. Basting; L. Austin
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Paper Abstract

Excimer laser marking, profiling and drilling are usually not performed at the focal region of a lens. It is usually more economical to optimize a process at a relatively low energy density and process larger areas at an image plane of a lens system. Internal(within the resonator, i.e. intracavity) methods as well as external methods are used to achieve goal.

Paper Details

Date Published: 16 December 1988
PDF: 4 pages
Proc. SPIE 0998, Excimer Beam Applications, (16 December 1988); doi: 10.1117/12.960203
Show Author Affiliations
U. Sowada, Lambda Physik (FRG)
J. Sercel, Lambda Physik (United States)
H. J. Kahlert, Lambda Physik (FRG)
D. Basting, Lambda Physik (FRG)
L. Austin, Lambda Physik, Inc. (United States)


Published in SPIE Proceedings Vol. 0998:
Excimer Beam Applications
Anthony N. Pirri; Bernhard P. Piwczyk, Editor(s)

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