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Proceedings Paper

Narrow-Band KrF Excimer Laser -- Tunable And Wavelength Stabilized
Author(s): Koich Wani; Yoshiro Ogata; Yoshiaki Watarai; Takuhiro Ono; Takeo Miyata; Reiji Sano; Yasuaki Terui
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Paper Abstract

A tunable and wavelength stabilized KrF excimer laser has been developed. Two Fabry-Perot etalons of 2.4 THz and 170 GHz FSR are placed inside of the laser cavity to reduce the lasing bandwidth to 0.003 nm (3 pm). The wavelength was found to be tunable over a range from 248.1 nm to 248.6 nm. Within this tuning range, a stable wavelength setting to ±0.5 pm was achieved with a feedback system composed of a wavelength detector and a controlling mechanism. This wavelength-stabilized tunable KrF excimer laser will find its applications in optical microlithography, plasma diagnostics and photochemical reactions.

Paper Details

Date Published: 16 December 1988
PDF: 7 pages
Proc. SPIE 0998, Excimer Beam Applications, (16 December 1988); doi: 10.1117/12.960201
Show Author Affiliations
Koich Wani, Matsushita Electronics Corporation (United States)
Yoshiro Ogata, Matsushita Electronics Corporation (United States)
Yoshiaki Watarai, Matsushita Electronics Corporation (United States)
Takuhiro Ono, Matsushita Research Institute Tokyo Inc. (United States)
Takeo Miyata, Matsushita Research Institute Tokyo Inc. (United States)
Reiji Sano, Matsushita Research Institute Tokyo Inc. (United States)
Yasuaki Terui, Matsushita Electric Industrial Co., Ltd. (United States)


Published in SPIE Proceedings Vol. 0998:
Excimer Beam Applications
Anthony N. Pirri; Bernhard P. Piwczyk, Editor(s)

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