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Proceedings Paper

Soft X-Ray Contact Printing Of Periodic Structures For Distributed Feedback (DFB) Semiconductor Lasers And Integrated Optics.
Author(s): K. M. Thomas; S. P. Beaumont; C. D. W. Wilkinson
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Paper Abstract

This paper describes work that has been done to develop X-ray contact printing of submicron gratings for integrated optical devices in our department. Previously, integrated optical devices, such as waveguide filters, have been made here using holographic exposure directly onto waveguide or semiconductor substrates. X-ray contact printing of holographically generated masks should make the fabrication of such devices simpler. The paper describes the work to date and gives fabrication details for the X-ray masks. X-ray contact printing is comparatively simple to perform, once the mask fabrication process is worked out. The paper describes our first results from the contact printer. In addition some results are presented on the manufacture of an X-ray mask for Quantum Dot structures.

Paper Details

Date Published: 6 December 1988
PDF: 10 pages
Proc. SPIE 0993, Integrated Optical Circuit Engineering VI, (6 December 1988); doi: 10.1117/12.960071
Show Author Affiliations
K. M. Thomas, University of Glasgow (United Kingdom)
S. P. Beaumont, University of Glasgow (United Kingdom)
C. D. W. Wilkinson, University of Glasgow (United Kingdom)


Published in SPIE Proceedings Vol. 0993:
Integrated Optical Circuit Engineering VI
Mark A. Mentzer, Editor(s)

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