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Proceedings Paper

Planar GaAs Zn-Diffused Waveguides: Fabrication, Characterization And Analysis
Author(s): T. Touam; C. Wu; M. Belanger; J. F. Currie; S. T. Najafi
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Paper Abstract

GaAs planar channel waveguides are fabricated with diffused boundaries using a zinc-doped spin-on-glass source. Low-loss (� 1.9 dB/cm) single-mode waveguides are achieved. Modal properties of the waveguides are experimentally investigated. A simple model is used to analyse the waveguides.

Paper Details

Date Published: 6 December 1988
PDF: 5 pages
Proc. SPIE 0993, Integrated Optical Circuit Engineering VI, (6 December 1988); doi: 10.1117/12.960068
Show Author Affiliations
T. Touam, Ecole Polytechnique (Canada)
C. Wu, Ecole Polytechnique (Canada)
M. Belanger, Ecole Polytechnique (Canada)
J. F. Currie, Ecole Polytechnique (Canada)
S. T. Najafi, Ecole Polytechnique (Canada)


Published in SPIE Proceedings Vol. 0993:
Integrated Optical Circuit Engineering VI
Mark A. Mentzer, Editor(s)

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