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Proceedings Paper

Buried Waveguides Produced By A One-Step Field-Assisted Ag+ Ion-Exchange In Glass
Author(s): C. Gunther; D. Jestel
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Paper Abstract

Common techniques for the fabrication of low-loss integrated optical components use two different steps for waveguide-burial. To perform a burial in only one step we examined the ion-exchange from solid-phase silverstripes into glass, covered by an eutecticum of NaNO3/KNO3 melt. Vapor deposited silver could well be structured chemically down to lateral dimensions of 2 um, thus allowing the fabrication of multimode and single mode strip-waveguides. Satisfying waveguide characteristics were achieved by a field assisted ion exchange (elec-tric field > 150 V/mm). This technique offers the advantage of only small increase in lateral cross section, even in the case of deep burial (10 4m). Therefore an independent control of both lateral and vertical waveguide-dimensions is possible, if the dissolution rate of silver for the used type of glass is known. Due to this fact buried waveguides with nearly circular cross-section can be fabricated in only one step. In our experiments a circularity of 92 % was achieved.

Paper Details

Date Published: 6 December 1988
PDF: 5 pages
Proc. SPIE 0993, Integrated Optical Circuit Engineering VI, (6 December 1988); doi: 10.1117/12.960063
Show Author Affiliations
C. Gunther, Universitat Dortmund (Germany)
D. Jestel, Universitat Dortmund (Germany)

Published in SPIE Proceedings Vol. 0993:
Integrated Optical Circuit Engineering VI
Mark A. Mentzer, Editor(s)

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