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Proceedings Paper

Interpretation Of High-Resolution X-Ray Scattering Measurements
Author(s): E. L. Church
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Paper Abstract

This paper discusses the interpretation of arc-second x-ray scattering of mirror surfaces in terms of the power spectral densities of their topographic roughness. Such scattering depends on surface spatial wave-lengths of the order of mm to cm; much longer than those involved in conventional visible-light scattering and profile measurements. Key features are: 1) Expressions are developed for analyzing smooth-surface scattering in the Fresnel regime at angles comparable with the point-spread function of the measuring apparatus. 2) A sampling-theorem representation is used to describe the scattering in terms of a discrete rather than a continuous convolution with the system point-spread function. 3) Corrections are included to account for finite-record-length effects. And 4), results are illustrated for simple power-law power spectra.

Paper Details

Date Published: 3 March 1981
PDF: 7 pages
Proc. SPIE 0257, Radiation Scattering in Optical Systems, (3 March 1981); doi: 10.1117/12.959623
Show Author Affiliations
E. L. Church, U.S. Army Armament Research and Development Command (United States)


Published in SPIE Proceedings Vol. 0257:
Radiation Scattering in Optical Systems
Gary H. Hunt, Editor(s)

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