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Proceedings Paper

Small-Computer Diaital Image Analysis
Author(s): Jan M. Engel
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Paper Abstract

The digital image analysis system (DIAS) is a software-oriented, computer-based approach to automatic image analysis. In this paper, some aspects of DIAS are discussed that can be performed with commercially available image pickup equipment attached to an optical microscope and linked to a sensor-based small computer (such as a System/7 or a Series/1). Through the application of an optical edge detection program, the system is adapted to precision measurement of linewidths and other parameters on semiconductor and garnet wafer patterns.

Paper Details

Date Published: 15 May 1981
PDF: 4 pages
Proc. SPIE 0236, 1980 European Conf on Optical Systems and Applications, (15 May 1981); doi: 10.1117/12.958996
Show Author Affiliations
Jan M. Engel, IBM Corporation (United States)


Published in SPIE Proceedings Vol. 0236:
1980 European Conf on Optical Systems and Applications
D. J. Kroon, Editor(s)

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