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Proceedings Paper

Measuring Micro-Vibrations By Heterodyne Speckle Interferometry
Author(s): R. Dandliker; J. F. Willemin
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Paper Abstract

In-plane as well as out-of-plane displacements and vibrations of objects with diffusely scattering surfaces are measured in real-time. Micro-vibrations with amplitudes down to 1 nm and frequencies up to 10 MHz were analysed at a spatial resolution of 30 μm.

Paper Details

Date Published: 15 May 1981
PDF: 3 pages
Proc. SPIE 0236, 1980 European Conf on Optical Systems and Applications, (15 May 1981); doi: 10.1117/12.958990
Show Author Affiliations
R. Dandliker, Institut de Microtechnique de l'Universite (Switzerland)
J. F. Willemin, Institut de Microtechnique de l'Universite (Switzerland)


Published in SPIE Proceedings Vol. 0236:
1980 European Conf on Optical Systems and Applications
D. J. Kroon, Editor(s)

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