Proceedings PaperGuided-Wave Acousto-Optical Devices On Silicon
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Silicon substrate is attractive for many guided-wave optical devices because of its superb electronic properties and the broad spectrum of fabrication technologies available. Acousto-optic interaction can provide active electro-optical functions for those devices on the electro-optically passive substrate. Hybrid material technologies such as the deposition of oriented ZnO thin film and the deposition of thin films with high photoelastic coefficients are employed for the generation of surface acoustic waves and for the preparation of optical waveguides for acousto-optic interaction. The performances of such devices are limited by surface acoustic wave propagation loss, by the acoustic wave dispersion on multi-layered structure, by restricted optical aperture dimension, and by the electromechanical conversion efficiency of the thin film piezoelectric element. The discussion involves a number of guided-wave acousto-optic devices with applications ranging from RF spectrum analysis, acousto-optical filtering, to optical interferometry.