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Proceedings Paper

Development Of Nomarski Microscopy For Quantitative Determination Of Surface Topography(A)
Author(s): J. S. Hartman; R. L. Gordon,; D. L. Lessor
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Paper Abstract

The use of Nomarski differential interference contrast (DIC) microscopy has been extended to provide nondestructive, quantitative analysis of a sample's surface topography. Theoretical modeling has determined the dependence of the image intensity on the micro-scope's optical components, the sample's optical properties, and the sample's surface orientation relative to the microscope. Results include expressions to allow the inversion of image intensity data to determine sample surface slopes. A commercial Nomarski system has been modified and characterized to allow the evaluation of the optical model. Data have been recorded with smooth, planar samples that verify the theoretical predictions.

Paper Details

Date Published: 25 December 1979
PDF: 8 pages
Proc. SPIE 0192, Interferometry, (25 December 1979); doi: 10.1117/12.957861
Show Author Affiliations
J. S. Hartman, Pacific Northwest Laboratory (United States)
R. L. Gordon,, Pacific Northwest Laboratory (United States)
D. L. Lessor, Pacific Northwest Laboratory (United States)

Published in SPIE Proceedings Vol. 0192:
George W. Hopkins, Editor(s)

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