Proceedings PaperThe Zygo Interferometer System
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The Zygo Interferometer System is designed to be suitable for a large spectrum of measurement applications. The fact that it has been widely accepted and is being used in its various configurations establishes the viability of the system architecture upon which it is based. The purpose of this paper is to provide a comprehensive description of this system so as to establish a base-line for what this state-of-the-art and off-the-shelf system can provide.