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Proceedings Paper

Surface Roughness Measurement Of Aspheric Surfaces
Author(s): Anthony M. Ledger
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Paper Abstract

A method of measuring the surface roughness of aspheric surfaces has been developed. This method combines surface replication techniques and FECO (fringes of equal chromatic order) interferometry to avoid many of the practical ligtitations of the more conventional techniques. A series of measurements was taken of a 30A calibration sample ovpr a long period of time and gave an average measured surface roughness by replication of 33A ±8A.

Paper Details

Date Published: 9 August 1979
PDF: 5 pages
Proc. SPIE 0184, Space Optics Imaging X-Ray Optics Workshop, (9 August 1979); doi: 10.1117/12.957448
Show Author Affiliations
Anthony M. Ledger, Perkin-Elmer Corporation (United States)


Published in SPIE Proceedings Vol. 0184:
Space Optics Imaging X-Ray Optics Workshop
Martin C. Weisskopf, Editor(s)

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