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Proceedings Paper

Prototype photomasksâ€"a low-cost alternative
Author(s): Gary M. Bang
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Paper Abstract

This paper describes a low cost camera system which may be constructed by the user to develop prototype circuit masks in a minimum of time and at the lowest possible cost. The camera elements are standard Hasselblad units, the materials are commercially available and all processing chemicals are from Kodak. Its construction was primarily for new circuit evaluation but has proven adaptable to short production runs.

Paper Details

Date Published: 17 July 1979
PDF: 4 pages
Proc. SPIE 0174, Developments in Semiconductor Microlithography IV, (17 July 1979); doi: 10.1117/12.957193
Show Author Affiliations
Gary M. Bang, John Fluke Mfg. Co., Inc. (United States)


Published in SPIE Proceedings Vol. 0174:
Developments in Semiconductor Microlithography IV
James W. Dey, Editor(s)

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