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Proceedings Paper

Large aperture ratio machining of the Z-cut quartz base on MEMS technology
Author(s): Haihe Xie; Xiaogfeng Jiang; Chun Lin; Xizhao Lu; Yuanqing Huang
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Paper Abstract

It is difficult to process quartz to get a large aperture ratio micropore(Φ127μm) by the mechanical tools, but it is possible processed by MEMS technology. The fluorine etching technology is used in experiments. The etching rate of quartz is proportional to the concentration of the HF acid. The etching rate of the mixtures of different proportions of the HF acid (49%) and the NH4F solution (35%) can be acquired, and the etching rate is lower if NH4F solution (35%) replace by the saturated NH4F solution. The experimental results conform to the chemical equation of Judge J S. In the experiment of the micropore etch, the wafers are respectively put in the mixtures of 1:1 and 3:2 ratio of the hydrofluoric acid (49%) and the ammonium fluoride solution (40%), and the morphology of micropore can be observed by the scanning electron microscopy and the confocal microscopy, and then the deepest depth of the micropore is tested by the confocal microscopy, the relationship between etching rate and the proportional of mixed solution can be got.

Paper Details

Date Published: 15 October 2012
PDF: 7 pages
Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84181B (15 October 2012); doi: 10.1117/12.956754
Show Author Affiliations
Haihe Xie, Xiamen Univ. (China)
Xiaogfeng Jiang, Xiamen Univ. (China)
Chun Lin, Xiamen Univ. (China)
Xizhao Lu, Huaqiao Univ. (China)
Yuanqing Huang, Xiamen Univ. (China)


Published in SPIE Proceedings Vol. 8418:
6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
Tianchun Ye; Song Hu; Yanqiu Li; Xiangang Luo; Xiaoyi Bao, Editor(s)

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