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Proceedings Paper

Electrical And Optical Properties Of Sputter-Deposited Materials
Author(s): W. T. Pawlewicz; N. Laegreid
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Paper Abstract

Data are provided to demonstrate that metals, semiconductors, and insulators can be sputter deposited to obtain preselected properties. Semiconductors and insulators such as CdTe, CdS, In2-x SnxO3, TiO2 and a-Si have been controllably and reproducibly deposited to obtain a wide spectrum of electrical and optical properties. Electrical resistivity and optical absorption have been related to compositional and structural properties. Metals such as Cu and Ag have been deposited for the purpose of achieving damage-resistant high reflectivity surfaces for high energy laser applications. A sputter deposited, mechanically polishable, damage-resistant mirror material with high reflectivity was developed.

Paper Details

Date Published: 26 September 1978
PDF: 15 pages
Proc. SPIE 0140, Optical Coatings: Applications and Utilization II, (26 September 1978); doi: 10.1117/12.956279
Show Author Affiliations
W. T. Pawlewicz, Battelle, Pacific Northwest Laboratories (United States)
N. Laegreid, Battelle, Pacific Northwest Laboratories (United States)


Published in SPIE Proceedings Vol. 0140:
Optical Coatings: Applications and Utilization II
Gary W. DeBell; Douglas H. Harrison, Editor(s)

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