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Proceedings Paper

A Review Of Optical Property Measurements Using Ellipsometry
Author(s): Thomas H. Allen
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Paper Abstract

The application of ellipsometry to optical measurement problems encountered in the optical coating industry will be discussed. Although ellipsometry has been demonstrated to be a sensitive and accurate technique for measuring the optical properties of surface films and bulk materials, it has not been widely used in this industry. Specific measurements that will be discussed are: thickness and optical constants of films, optical constants of bulk materials, and stress-birefringence. Special precautions and errors caused by thin film surface contaminants will be described. Finally the applicability of ellipsometry to in-situ measurements and deposition monitoring will be reviewed.

Paper Details

Date Published: 26 September 1978
PDF: 10 pages
Proc. SPIE 0140, Optical Coatings: Applications and Utilization II, (26 September 1978); doi: 10.1117/12.956267
Show Author Affiliations
Thomas H. Allen, Optical Coating Laboratory, Inc. (United States)

Published in SPIE Proceedings Vol. 0140:
Optical Coatings: Applications and Utilization II
Gary W. DeBell; Douglas H. Harrison, Editor(s)

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