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Proceedings Paper

Latest Developments In High Resolution Aplanetic Holographic Objectives
Author(s): J. P. Laude; D. Lepere
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Paper Abstract

Owing to restrictions determined by the laws of diffraction, electronic and X-ray systems are gradually replacing optical objectives in microelectronics for imaging. It is, however, interesting to analyze the means by which the performances of optical solutions may be increased by working with ultraviolet rays at shorter wavelengths, enhancing the chances of producing the optical objectives at lower costs than the electronic and X-ray objectives. Ultraviolet objectives of short wavelengths need catadioptrical systems. Substances presently used for Transmission are unsuitable for calculations of combinations in high resolution ; they are in fact, limited in Transmission in the ultraviolet of Lyman. The possibility of using a catadioptrical objective obtained by a holographic recording of a fringes system on a concave spherical support was announced by our company in 1975. Since then we have demonstrated how such systems can produce aplanatic images. (Variations configurations of this type have been calculated.) Today's known solutions for the problem give a resolution of 0.5 µ on a limited field. But new solutions involving several catadioptric holograms are in progress. We have manufactured such objectives and we show tests of resolution in problems of mask making in microelectronics.

Paper Details

Date Published: 6 September 1978
PDF: 9 pages
Proc. SPIE 0135, Developments in Semiconductor Microlithography III, (6 September 1978); doi: 10.1117/12.956115
Show Author Affiliations
J. P. Laude, Instruments S. A. (France)
D. Lepere, Instruments S. A. (France)

Published in SPIE Proceedings Vol. 0135:
Developments in Semiconductor Microlithography III
Dino R. Ciarlo; James W. Dey; Ken Hoeppner, Editor(s)

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