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Proceedings Paper

Partial Coherence In Projection Printing
Author(s): Ronald S. Hershel
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Paper Abstract

A mathematical model for partially coherent imaging in projection printing is presented using Fourier transform methods. Some interesting two-dimensional examples are offered which illustrate the dramatic effects of partial coherence in the mask illumination on the edge contours in the image. Optical simulation techniques are discussed with possible application to system evaluation and design.

Paper Details

Date Published: 6 September 1978
PDF: 6 pages
Proc. SPIE 0135, Developments in Semiconductor Microlithography III, (6 September 1978); doi: 10.1117/12.956109
Show Author Affiliations
Ronald S. Hershel, University of Arizona (United States)


Published in SPIE Proceedings Vol. 0135:
Developments in Semiconductor Microlithography III
Dino R. Ciarlo; James W. Dey; Ken Hoeppner, Editor(s)

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