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Proceedings Paper

Inspection Of Parts In Micro-Inches With A Closed Circuit Television System Or How To Measure To A Half-Millionth Of An Inch Without Hardly Trying
Author(s): Lewis C. Page
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Paper Abstract

A brief discussion on a unique electronic measurement system recently developed for the semi-conductor industry and other applications where materials must be fashioned in extremely small dimensions.

Paper Details

Date Published: 28 February 1978
PDF: 4 pages
Proc. SPIE 0129, Effective Utilization of Optics in Quality Assurance I, (28 February 1978); doi: 10.1117/12.956019
Show Author Affiliations
Lewis C. Page, Pulse Systems, Inc. (United States)


Published in SPIE Proceedings Vol. 0129:
Effective Utilization of Optics in Quality Assurance I
Jose Cruz, Editor(s)

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