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Proceedings Paper

Surface Flatness Measurement System
Author(s): S. Wakana; M. Inada; Y. Goto; M. Nakashima
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Paper Abstract

We have developed a laser surface flatness measurement system, based on a new measurement principle. It measures angular displacements at a fixed interval, then caliculates the surface profile by totaling the angular data multiplies with the measurement pitch. With calibration, our system's measurement accuracy is better than 0.01 μm at about 1 mm/s.

Paper Details

Date Published: 11 October 1989
PDF: 6 pages
Proc. SPIE 1113, Reflective Optics II, (11 October 1989); doi: 10.1117/12.955591
Show Author Affiliations
S. Wakana, Fujitsu Laboratories Ltd. (Japan)
M. Inada, Fujitsu Laboratories Ltd. (Japan)
Y. Goto, Fujitsu Laboratories Ltd. (Japan)
M. Nakashima, Fujitsu Laboratories Ltd. (Japan)


Published in SPIE Proceedings Vol. 1113:
Reflective Optics II
Dietrich G. Korsch, Editor(s)

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