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Proceedings Paper

Metrology Employing Deformable Optics (MEDO)
Author(s): Burke E. Nelson; Dennis Mihora
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Paper Abstract

A technique is presented for the automated metrology of difficult to manufacture (large, highly aspheric, very precise) optics. This technique is termed MEDO- Metrology Employing Deformable Optics. It employs an Electrostatic Membrane Reflector (EMR) as the reference surface in a Twyman-Green interferometer, in combination with a commercially-available Phase Measuring Interferometer for automated data reduction. An analysis of the useful range of this proposed instrument indicates that it would, indeed, speed the production of many currently envisioned optics.

Paper Details

Date Published: 11 October 1989
PDF: 12 pages
Proc. SPIE 1113, Reflective Optics II, (11 October 1989); doi: 10.1117/12.955589
Show Author Affiliations
Burke E. Nelson, RDA, System Planning and Analysis Division (United States)
Dennis Mihora, GRC, Santa Barbara Division (United States)

Published in SPIE Proceedings Vol. 1113:
Reflective Optics II
Dietrich G. Korsch, Editor(s)

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