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Proceedings Paper

Surface Anisotropy Measurements By Ellipsometry
Author(s): J. P. Marton
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Paper Abstract

Surface anisotropy of an otherwise isotropic solid may be the result of surface contamination or surface aggregation. In the latter case, an analysis of the degree of aggregation, its depth, and the nature of the aggregates is possible by the recently developed "generalized" Maxwell Garnett Theory. In order to carry out the analysis the effective indices of refraction are needed, which can be measured accurately with the ellipsometer at different angles of incidence. Details of the analysis and examples, using some metals and silicon will be presented.

Paper Details

Date Published: 19 October 1977
PDF: 6 pages
Proc. SPIE 0112, Optical Polarimetry: Instrumentation and Applications, (19 October 1977); doi: 10.1117/12.955546
Show Author Affiliations
J. P. Marton, McMaster University (Canada)

Published in SPIE Proceedings Vol. 0112:
Optical Polarimetry: Instrumentation and Applications
Rasheed M. A. Azzam; David Coffeen, Editor(s)

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