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Proceedings Paper

Modulated Light Ellipsometry At 10.6 m
Author(s): M. E. Pedinoff; M. Braunstein; O. M. Stafsudd
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Paper Abstract

In this paper we highlight the salient features of the Hughes Modulated Light Ellipsometer system including the details of the critical optical and electronic components. We present an analytical discussion of the effects of various experimental errors, including signal stability and sample alignment, on the accuracy of the system for substrate and thin-film measurements. The regions of optimum measurement accuracy deduced from these analytical studies are used as an experimental guide in the laboratory. The system has been used to study various substrates and film-substrate systems including ThF4, ZnSe, KCl, CdTe, ZnSe on KCl, and ThF4 on ZnSe. The results of these measurements are presented and discussed.

Paper Details

Date Published: 19 October 1977
PDF: 8 pages
Proc. SPIE 0112, Optical Polarimetry: Instrumentation and Applications, (19 October 1977); doi: 10.1117/12.955545
Show Author Affiliations
M. E. Pedinoff, Hughes Research Laboratories (United States)
M. Braunstein, Hughes Research Laboratories (United States)
O. M. Stafsudd, University of California at Los Angeles (United States)


Published in SPIE Proceedings Vol. 0112:
Optical Polarimetry: Instrumentation and Applications
Rasheed M. A. Azzam; David Coffeen, Editor(s)

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