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Proceedings Paper

Design And Construction Of A Phase-Locked Interference Microscope
Author(s): Glen W. Johnson; Duncan T. Moore
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Paper Abstract

An A.C. interference microscope based on a technique called phase-locked interferometry has been constructed. The instrument is capable of detecting phase differences approaching λ/100. It may be used for measuring surface features (roughness, curvature) or transparent phase objects such as gradient index materials, microballoons and biological samples.

Paper Details

Date Published: 10 August 1977
PDF: 10 pages
Proc. SPIE 0103, Systems Integration and Optical Design: Another Look, (10 August 1977); doi: 10.1117/12.955401
Show Author Affiliations
Glen W. Johnson, University of Rochester (United States)
Duncan T. Moore, University of Rochester (United States)


Published in SPIE Proceedings Vol. 0103:
Systems Integration and Optical Design: Another Look
Stanley Refermat, Editor(s)

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