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Proceedings Paper

Large Area Masking Techniques For Thin Film Transistor Arrays
Author(s): T. P. Brody
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Paper Abstract

Thin Film Transistor technology permits the generation. af extremely large area active networks, which currently find their principal application in the Large Scale Integration of solid state, flat panel displays. This paper reviews some of the problems encountered in carrying a design for a large area active matrix through the stages of layout, pattern-generation and stencil mask preparation, the latter being used in the final fabrication of the thin film circuits. An alternative approach, used in thl laboratory, which has great versatility, and which has yielded the largest circuits so far generated (36 in), will also be touched upon.

Paper Details

Date Published: 8 August 1977
PDF: 11 pages
Proc. SPIE 0100, Developments in Semiconductor Microlithography II, (8 August 1977); doi: 10.1117/12.955365
Show Author Affiliations
T. P. Brody, Westinghouse Research Laboratories (United States)


Published in SPIE Proceedings Vol. 0100:
Developments in Semiconductor Microlithography II
James W. Giffin, Editor(s)

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