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Proceedings Paper

Projection Photolithography Of Large CCD Arrays
Author(s): Don Baylis
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Paper Abstract

The topic of this presentation is the photolithographic aspect of fabricating CCD arrays. CCD stands for Charge-Coupled Device, which is a relatively new type of semiconductor device. The basic CCD device is an analog shift register. In the same manner a digital shift register is used to delay or buffer a stream of digital data, a CCD can be used to delay an analog signal.

Paper Details

Date Published: 8 August 1977
PDF: 4 pages
Proc. SPIE 0100, Developments in Semiconductor Microlithography II, (8 August 1977); doi: 10.1117/12.955364
Show Author Affiliations
Don Baylis, Div. of Fairchild Camera Instr. Corp. (United States)


Published in SPIE Proceedings Vol. 0100:
Developments in Semiconductor Microlithography II
James W. Giffin, Editor(s)

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