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Proceedings Paper

Effect Of Plastic Deformation Of Silicon Wafers On Overlay
Author(s): R. E. Gegenwarth; F. P. Laming
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Paper Abstract

Direct measurement of lateral distortion in (100) silicon wafers reveals random shifts as large as 0.5 μm resulting from high-temperature processes commonly used during the manufacture of integrated circuits. Such shifts are commensurate in size with the dimensional tolerances required for high-performance integrated circuits, and therefore pose a serious problem in the manufacture of devices requiring submicrometer lines or overlay accuracy of less than 1 μm. The effect has been studied after processing in various conditions; the lateral or in-plane distortions appear to increase as wafers undergo multiple-processing steps.

Paper Details

Date Published: 8 August 1977
PDF: 8 pages
Proc. SPIE 0100, Developments in Semiconductor Microlithography II, (8 August 1977); doi: 10.1117/12.955355
Show Author Affiliations
R. E. Gegenwarth, IBM System Products Division (United States)
F. P. Laming, I BMSystem Products Division (United States)


Published in SPIE Proceedings Vol. 0100:
Developments in Semiconductor Microlithography II
James W. Giffin, Editor(s)

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