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Proceedings Paper

Metrology Of A Diamond Turned Toric Resonator Component
Author(s): Theodore T. Saito; Jones Arnold
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Paper Abstract

We describe the set up and measurement techniques to evaluate a diamond turned 300 mm diameter copper toroid. A single beam interferometer, rotary table, and Moore measuring machine were used to measure the circular flatness of 0.63 μm (25 μ") and 30 nm (1.2 μ") rms figure deviation. A computer program was used to evaluate the figure and absolute average slope error of 12 μrad.

Paper Details

Date Published: 16 December 1976
PDF: 3 pages
Proc. SPIE 0093, Advances in Precision Machining of Optics, (16 December 1976); doi: 10.1117/12.955127
Show Author Affiliations
Theodore T. Saito, Lawrence Livermore Laboratory (United States)
Jones Arnold, Union Carbide (United States)

Published in SPIE Proceedings Vol. 0093:
Advances in Precision Machining of Optics
Theodore T. Saito, Editor(s)

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