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Proceedings Paper

A New Automatic Ellipsometer
Author(s): Grant M. Miles
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Paper Abstract

The design and performance of a new automatic ellipsometer is described. The instrument is of the balancing or null-seeking type, using Faraday modulators to detect out-of-balance conditions, stepper motors to drive the polarizing and analyzing prisms, and Moire fringe counters to measure the angles of the prisms.

Paper Details

Date Published: 22 October 1976
PDF: 4 pages
Proc. SPIE 0088, Polarized Light: Instruments, Devices, Applications, (22 October 1976); doi: 10.1117/12.955008
Show Author Affiliations
Grant M. Miles, Karl Lambrecht Corp. (United States)


Published in SPIE Proceedings Vol. 0088:
Polarized Light: Instruments, Devices, Applications
Rasheed M. A. Azzam; W. Lewis Hyde, Editor(s)

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