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Proceedings Paper

Laser Personalization Of Integrated Circuits
Author(s): S. E. Schuster; P. W. Cook
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Paper Abstract

The use of nanosecond dye laser pulses to form low resistance reliable ohmic contacts between conductors on integrated circuit chips after fabrication is described. Possible applications which show the potential importance of this process to integrated circuit personalization are discussed.

Paper Details

Date Published: 30 December 1976
PDF: 3 pages
Proc. SPIE 0086, Industrial Applications of High Power Laser Technology, (30 December 1976); doi: 10.1117/12.954967
Show Author Affiliations
S. E. Schuster, IBM Thomas J. Watson Research Center (United States)
P. W. Cook, IBM Thomas J. Watson Research Center (United States)


Published in SPIE Proceedings Vol. 0086:
Industrial Applications of High Power Laser Technology
John F. Ready, Editor(s)

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