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Proceedings Paper

Beam Deflection At High Accuracy And Precision
Author(s): D. P. Jablonowski; J. Raamot
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Paper Abstract

Techniques have been developed to extend the accuracy and repeatibility of X-Y beam deflection systems. Absolute beam placements of ± 5pm over 100mm (+ 1/20,000) with precisions of + 2.5μm (+ 1/40,000) have been demonstrated at speeds far beyond the limitation imposed by an optimum servo control. A comparison is made of scanning times at various precisions; results indicate that high accuracy and precision can be attained without materially sacrificing system speed. Basic to the operation of the deflection apparatus is an optical position monitoring capability and a unique control philosophy that drives the deflectors in open loop mode. Distortion is compensated by the position monitor and the control logic, so that beam placement has a guaranteed absolute accuracy in the deflection plane. Limitations of the present apparatus will be discussed, as well as possible extensions of precision and accuracy.

Paper Details

Date Published: 10 January 1977
PDF: 9 pages
Proc. SPIE 0084, Laser Scanning Components and Techniques: Design Considerations/Trends, (10 January 1977); doi: 10.1117/12.954921
Show Author Affiliations
D. P. Jablonowski, Western Electric Company (United States)
J. Raamot, Western Electric Company (United States)

Published in SPIE Proceedings Vol. 0084:
Laser Scanning Components and Techniques: Design Considerations/Trends
Leo Beiser; Gerald F. Marshall, Editor(s)

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