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Proceedings Paper

Overlay Precision For Micron Lithography
Author(s): J. A. Underhill
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Paper Abstract

Attention is directed to the need for pattern-to-pattern overlay precision commensurate with micron lithography for integrated circuit fabrication and an error target is suggested. Several sources of overlay error are identified, including: Position of pattern edges in processed layers Mask/wafer bending distortions Alignment mark detection Pattern generation, and Thermal expansion of masks and wafers Pattern replication The magnitude of parameter control needed to maintain the desired total precision is discussed for several cases. Individual errors need to be less than a few tenths of a pm for the total error objective to be met. Although this magnitude of error approaches the limits of optical measurement precision, the resulting circuit pattern can be adequately measured with vernier patterns. Reported achievements in E-Beam lithography show successful error containment for small fields. High precision overlay for full wafer exposure using masks will be significantly more difficult to achieve (e.g., in optical scanning cameras, photo-emissive E-Beam replicators, and X-ray proximity printers). However, there is justification for the effort in the increased wafers/unit time (thruput) that can be realized for lithographic tools using full wafer exposure.

Paper Details

Date Published: 20 September 1976
PDF: 10 pages
Proc. SPIE 0080, Developments in Semiconductor Microlithography, (20 September 1976); doi: 10.1117/12.954838
Show Author Affiliations
J. A. Underhill, IBM System Products Division (United States)

Published in SPIE Proceedings Vol. 0080:
Developments in Semiconductor Microlithography
James W. Giffin, Editor(s)

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