Share Email Print
cover

Proceedings Paper

Simple Step-And-Repeat Precision Copy Camera
Author(s): Berlyn Brixner; Michael Christian
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The copy camera resolves 320 lines/mm on high-resolution film with less than 0.01-mm distortion throughout a 30-mm-diameter image made at 20:1 reduction in white or green light. This performance is the result of five special features: (1) an f/4 precision copy lens, which makes diffraction-limited images throughout the image field; (2) a precision focusing mount; (3) a pressure plate that maintains sharp focus for step-and-repeat exposures; (4) a simple indexing jig that locates the images precisely on 101.6- by 127.0-mm film; and (5) a film holder with registration pins to position the prepunched film precisely in relation to the image positions. The camera is used routinely to make single- and stepped-image photofabrication masks, high-contrast resolution test charts, and special reticles.

Paper Details

Date Published: 20 September 1976
PDF: 5 pages
Proc. SPIE 0080, Developments in Semiconductor Microlithography, (20 September 1976); doi: 10.1117/12.954831
Show Author Affiliations
Berlyn Brixner, Los Alamos Scientific Laboratory of the University of California (United States)
Michael Christian, Los Alamos Scientific Laboratory of the University of California (United States)


Published in SPIE Proceedings Vol. 0080:
Developments in Semiconductor Microlithography
James W. Giffin, Editor(s)

© SPIE. Terms of Use
Back to Top