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Proceedings Paper

Applications Of Laser Interferometry To Metrology
Author(s): John O. Bumgarner
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Paper Abstract

Functional descriptions of laser interferometers are presented. The specific application of a Hewlett-Packard Interferometer to the evaluation of the x axis motion of a scanning microdensitometer is detailed. Results of the analysis are discussed. Extensions to some other areas of metrology are given.

Paper Details

Date Published: 20 October 1975
PDF: 6 pages
Proc. SPIE 0060, Solving Quality Control and Reliability Problems with Optics, (20 October 1975); doi: 10.1117/12.954395
Show Author Affiliations
John O. Bumgarner, Electromagnetic Systems Laboratories (United States)

Published in SPIE Proceedings Vol. 0060:
Solving Quality Control and Reliability Problems with Optics
Juan J. Amodei; Harry N. Lowell, Editor(s)

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