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Proceedings Paper

Machined Surface Profile Measurement Using Grazing-Angle Illumination
Author(s): T. Sawatari
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Paper Abstract

High grazing-angle illumination interferometry is described. Two applications are discussed: microscopic surface profile measurement of machined surfaces (ground, one-dimensional), and observation of macroscopic surface deviations. In both applications it is shown that the grazing angle interferometry is applicable to objects having surface roughness up to 5-7pm (RMS).

Paper Details

Date Published: 20 October 1975
PDF: 7 pages
Proc. SPIE 0060, Solving Quality Control and Reliability Problems with Optics, (20 October 1975); doi: 10.1117/12.954385
Show Author Affiliations
T. Sawatari, Bendix Research Laboratories (United States)


Published in SPIE Proceedings Vol. 0060:
Solving Quality Control and Reliability Problems with Optics
Juan J. Amodei; Harry N. Lowell, Editor(s)

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