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Proceedings Paper

Surface Inspection Of Optical And Semiconductor Components
Author(s): B J Biddles; L R Baker
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Paper Abstract

A laser scanning inspection gauge has been designed which enables quick objective assessment of optically polished surfaces to be carried out by relatively unskilled operators. The gauge is suitable for batch inspection of optical flats, windows, and lenses over a wide range of sizes and powers. It is capable of detecting and measuring surface defects such as scratches, digs, poor polish, surface contamination and inclusions in the body of the glass, or in a cement layer. It is possible to modify the gauge to permit inspection of lenses on the block, and reflecting surfaces, including semiconductor wafers.

Paper Details

Date Published: 20 October 1975
PDF: 5 pages
Proc. SPIE 0060, Solving Quality Control and Reliability Problems with Optics, (20 October 1975); doi: 10.1117/12.954383
Show Author Affiliations
B J Biddles, Sira Institute Ltd (England)
L R Baker, Sira Institute Ltd (England)

Published in SPIE Proceedings Vol. 0060:
Solving Quality Control and Reliability Problems with Optics
Juan J. Amodei; Harry N. Lowell, Editor(s)

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