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Proceedings Paper

Optical Tests For Mechanical Performance Of Modern Step-And-Repeat Cameras
Author(s): Jeremy D. Nichols
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Paper Abstract

Step-and-repeat cameras are relatively simple machines from a mechanical viewpoint but since the integrated circuit industry's tolerances are so small the burden of performance placed upon these machines is great. Mechanical performance tests are sometimes done as part of a series of general acceptance tests upon delivery of a new camera but are most often called upon to help locate trouble in an existing machine.

Paper Details

Date Published: 1 March 1974
PDF: 6 pages
Proc. SPIE 0055, Technological Advances in Micro and Submicro Photofabrication Imagery, (1 March 1974); doi: 10.1117/12.954250
Show Author Affiliations
Jeremy D. Nichols, Hewlett-Packard (United States)


Published in SPIE Proceedings Vol. 0055:
Technological Advances in Micro and Submicro Photofabrication Imagery
William Converse; J. M. Graf, Editor(s)

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